diff --git a/interfaces/innerkits/dump_catcher/lite_perf.cpp b/interfaces/innerkits/dump_catcher/lite_perf.cpp
index c1bfd55c1cde004b2c637efacbcee55c6ef9bec0..e048bc1982f3a24aef8c2c42c51db08f2ceb5f14 100644
--- a/interfaces/innerkits/dump_catcher/lite_perf.cpp
+++ b/interfaces/innerkits/dump_catcher/lite_perf.cpp
@@ -67,6 +67,7 @@ private:
     bool DoReadBuf(int fd);
     bool DoReadRes(int fd, int& pollRet);
     bool ParseSampleStacks(const std::string& datas);
+    int WaitpidTimeout(pid_t pid);
 
     std::string bufMsg_;
     std::string resMsg_;
@@ -118,6 +119,12 @@ int LitePerf::Impl::StartProcessStackSampling(const std::vector<int>& tids, int
         static_cast<int>(timeout / 1000));
     if (req != ResponseCode::REQUEST_SUCCESS) {
         DFXLOGE("Failed to request liteperf pipe read.");
+        if (pipeReadFd[0] != -1) {
+            close(pipeReadFd[0]);
+        }
+        if (pipeReadFd[1] != -1) {
+            close(pipeReadFd[1]);
+        }
         isRunning_.store(false);
         return -1;
     }
@@ -134,6 +141,8 @@ int LitePerf::Impl::StartProcessStackSampling(const std::vector<int>& tids, int
         }
     } while (false);
     FinishDump();
+    close(pipeReadFd[0]);
+    close(pipeReadFd[1]);
     return res;
 }
 
@@ -292,6 +301,28 @@ bool LitePerf::Impl::InitDumpParam(const std::vector<int>& tids, int freq, int d
     return true;
 }
 
+int LitePerf::Impl::WaitpidTimeout(pid_t pid)
+{
+    constexpr int waitCount = 150;
+    for (int i = 0; i <= waitCount; i++) {
+        int result = waitpid(pid, nullptr, WNOHANG);
+        if (result == pid) {
+            return 0;
+        }
+        if (result == -1) {
+            DFXLOGE("Failed to wait pid(%{public}d)", pid);
+            kill(pid, SIGKILL);
+            return -1;
+        }
+
+        constexpr time_t usleepTime = 100000;
+        usleep(usleepTime);
+    }
+    DFXLOGE("Failed to wait pid(%{public}d), timeout", pid);
+    kill(pid, SIGKILL);
+    return -1;
+}
+
 int LitePerf::Impl::ExecDump(const std::vector<int>& tids, int freq, int durationMs)
 {
     static LitePerfParam lperf;
@@ -324,9 +355,10 @@ int LitePerf::Impl::ExecDump(const std::vector<int>& tids, int freq, int duratio
             _exit(0);
         }
     }
-    int res = waitpid(pid, nullptr, 0);
+    int res = WaitpidTimeout(pid);
     if (res < 0) {
         DFXLOGE("Failed to wait pid(%{public}d), errno(%{public}d)", pid, errno);
+        return -1;
     } else {
         DFXLOGI("wait pid(%{public}d) exit", pid);
     }